Semiconductor device having a laterally modulated gate workfunction and method of fabrication

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United States of America Patent

PATENT NO 7666727
APP PUB NO 20050221548A1
SERIAL NO

11099190

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Abstract

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A transistor comprising a gate electrode formed on a gate dielectric layer formed on a substrate. A pair of source/drain regions are formed in the substrate on opposite sides of the laterally opposite sidewalls of the gate electrode. The gate electrode has a central portion formed on the gate dielectric layer and over the substrate region between the source and drain regions and a pair sidewall portions which overlap a portion of the source/drain regions wherein the central portion has a first work function and said pair of sidewall portions has a second work function, wherein the second work function is different than the first work function.

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Patent Owner(s)

Patent OwnerAddress
TAHOE RESEARCH LTDDUBLIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chau, Robert S Beaverton, US 516 19896
Doczy, Mark Beaverton, US 53 2295
Doyle, Brian Portland, US 115 2959
Hareland, Scott A Tigard, US 74 3252

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