Ultra low contact area end effector
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 2, 2010
Grant Date -
Apr 16, 2009
app pub date -
Oct 11, 2007
filing date -
Oct 11, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly.
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