System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology
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United States of America Patent
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Mar 9, 2010
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N/A
app pub date -
Dec 16, 2004
filing date -
Jun 24, 2003
priority date (Note) -
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Abstract
A substrate processing system includes a first, movable surface tension gradient device, a dicing device and a system controller. The first, movable surface tension gradient device is capable of supporting a first process within a first meniscus. The first meniscus being supported between the first surface tension gradient device and a first surface of the substrate. The first movable surface tension gradient device capable of being moved relative to the first surface of the substrate. The dicing device is oriented to a desired dicing location. The desired dicing location being encompassed by the meniscus. The system controller is coupled to the dicing device and the surface tension gradient device. The system controller includes a process recipe. A method for dicing a substrate is also described.
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