Methods and systems for utilizing design data in combination with inspection data
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United States of America Patent
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Mar 9, 2010
Grant Date -
Jul 5, 2007
app pub date -
Nov 20, 2006
filing date -
Nov 18, 2005
priority date (Note) -
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Abstract
Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for determining a position of inspection data in design data space includes aligning data acquired by an inspection system for alignment sites on a wafer with data for predetermined alignment sites. The method also includes determining positions of the alignment sites on the wafer in design data space based on positions of the predetermined alignment sites in the design data space. In addition, the method includes determining a position of inspection data acquired for the wafer by the inspection system in the design data space based on the positions of the alignment sites on the wafer in the design data space. In one embodiment, the position of the inspection data is determined with sub-pixel accuracy.
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