Methods for sensor having capacitor on chip
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United States of America Patent
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Mar 16, 2010
Grant Date -
Feb 14, 2008
app pub date -
Oct 23, 2007
filing date -
Apr 14, 2006
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Abstract
In an exemplary embodiment, a method for a magnetic sensor includes forming a first conductive layer over a substrate containing circuitry, forming a dielectric layer over the first conductive layer, forming a second conductive layer over the dielectric layer such that the first conductive layer, the dielectric layer, and the second conductive layer form a first capacitor, and providing first and second terminals, wherein the first terminal is coupled to the first conductive layer and the second terminal is coupled to the second conductive layer.
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