US Patent No: 7,681,312

Number of patents in Portfolio can not be more than 2000

Membrane probing system

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ALSO PUBLISHED AS: 20070283555
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR254

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bayne, Michael A Vancouver, WA 19 188
Gleason, Reed Portland, OR 20 198
Koxxy, Martin Hillsboro, OR 12 101
Lesher, Timothy Beaverton, OR 17 177
Smith, Kenneth Porum, OK 81 512

Cited Art

Patent Info (Count) # Cites Year
 
FORMFACTOR, INC. (151)
5,476,211 Method of manufacturing electrical contacts, using a sacrificial member 353 1993
5,917,707 Flexible contact structure with an electrically conductive shell 288 1994
6,049,976 Method of mounting free-standing resilient electrical contact structures to electronic components 119 1995
5,772,451 Sockets for electronic components and methods of connecting to electronic components 342 1995
5,974,662 Method of planarizing tips of probe elements of a probe card assembly 340 1995
5,829,128 Method of mounting resilient contact structures to semiconductor devices 213 1995
5,601,740 Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires 111 1995
5,820,014 Solder preforms 113 1996
5,773,780 Method of severing bond wires and forming balls at their ends 75 1996
5,900,738 Contact structure device for interconnections, interposer, semiconductor assembly and package using the same and method 145 1996
5,926,951 Method of stacking electronic components 154 1996
6,184,587 Resilient contact structures, electronic interconnection component, and method of mounting resilient contact structures to electronic components 111 1996
6,242,803 Semiconductor devices with integral contact structures 87 1996
6,274,823 Interconnection substrates with resilient contact structures on both sides 110 1996
6,476,333 Raised contact structures (solder columns) 70 1996
6,064,213 Wafer-level burn-in and test 251 1997
5,806,181 Contact carriers (tiles) for populating larger substrates with spring contacts 253 1997
5,994,152 Fabricating interconnects and tips using sacrificial substrates 172 1997
6,442,831 Method for shaping spring elements 72 1997
6,482,013 Microelectronic spring contact element and electronic component having a plurality of spring contact elements 137 1997
5,832,601 Method of making temporary connections between electronic components 187 1997
5,864,946 Method of making contact tip structures 157 1997
5,878,486 Method of burning-in semiconductor devices 107 1997
5,884,398 Mounting spring elements on semiconductor devices 103 1997
5,983,493 Method of temporarily, then permanently, connecting to a semiconductor device 117 1997
5,998,228 Method of testing semiconductor 126 1997
6,032,356 Wafer-level test and burn-in, and semiconductor process 158 1997
6,184,053 Method of making microelectronic spring contact elements 192 1997
5,912,046 Method and apparatus for applying a layer of flowable coating material to a surface of an electronic component 76 1997
5,998,864 Stacking semiconductor devices, particularly memory chips 176 1997
6,050,829 Making discrete power connections to a space transformer of a probe card assembly 154 1997
6,307,161 Partially-overcoated elongate contact structures 69 1997
6,043,563 Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals 157 1997
6,741,085 Contact carriers (tiles) for populating larger substrates with spring contacts 88 1997
6,520,778 Microelectronic contact structures, and methods of making same 144 1998
6,720,501 PC board having clustered blind vias 68 1998
6,042,712 Apparatus for controlling plating over a face of a substrate 110 1998
6,090,261 Method and apparatus for controlling plating over a face of a substrate 81 1998
6,110,823 Method of modifying the thickness of a plating on a member by creating a temperature gradient on the member, applications for employing such a method, and structures resulting from such a method 172 1998
6,023,103 Chip-scale carrier for semiconductor devices including mounted spring contacts 148 1998
6,033,935 Sockets for "springed" semiconductor devices 108 1998
6,669,489 Interposer, socket and assembly for socketing an electronic component and method of making and using same 106 1998
6,330,164 Interconnect assemblies and methods including ancillary electronic component connected in immediate proximity of semiconductor device 120 1998
6,029,344 Composite interconnection element for microelectronic components, and method of making same 202 1998
6,246,247 Probe card assembly and kit, and methods of using same 112 1998
6,441,315 Contact structures with blades having a wiping motion 104 1998
6,690,185 Large contactor with multiple, aligned contactor units 113 1998
6,255,126 Lithographic contact elements 173 1998
6,268,015 Method of making and using lithographic contact springs 115 1998
6,150,186 Method of making a product with improved material properties by moderate heat-treatment of a metal incorporating a dilute additive 94 1998
6,429,029 Concurrent design and subsequent partitioning of product and test die 126 1998
6,456,099 Special contact points for accessing internal circuitry of an integrated circuit 102 1998
6,215,670 Method for manufacturing raised electrical contact pattern of controlled geometry 85 1999
6,208,225 Filter structures for integrated circuit interfaces 135 1999
6,218,910 High bandwidth passive integrated circuit tester probe card assembly 131 1999
6,448,865 Integrated circuit interconnect system 72 1999
6,452,411 Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses 101 1999
6,480,978 Parallel testing of integrated circuit devices using cross-DUT and within-DUT comparisons 79 1999
6,499,121 Distributed interface for parallel testing of multiple devices using a single tester channel 92 1999
6,627,483 Method for mounting an electronic component 80 1999
6,644,982 Method and apparatus for the transport and tracking of an electronic component 100 1999
6,887,723 Method for processing an integrated circuit including placing dice into a carrier and testing 72 1999
6,468,098 Electrical contactor especially wafer level contactor using fluid pressure 90 1999
6,655,023 Method and apparatus for burning-in semiconductor devices in wafer form 81 1999
6,827,584 Interconnect for microelectronic structures with enhanced spring characteristics 90 1999
6,491,968 Methods for making spring interconnect structures 95 1999
6,672,875 Spring interconnect structures 96 1999
6,339,338 Apparatus for reducing power supply noise in an integrated circuit 88 2000
6,168,974 Process of mounting spring contacts to semiconductor devices 104 2000
6,459,343 Integrated circuit interconnect system forming a multi-pole filter 68 2000
6,232,149 Sockets for "springed" semiconductor devices 77 2000
6,509,751 Planarizer for a semiconductor contactor 122 2000
6,215,196 Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals 70 2000
6,640,432 Method of fabricating shaped springs 100 2000
6,677,744 System for measuring signal path resistance for an integrated circuit tester interconnect structure 69 2000
6,476,630 Method for testing signal paths between an integrated circuit wafer and a wafer tester 73 2000
6,525,555 Wafer-level burn-in and test 96 2000
6,727,579 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 90 2000
6,685,817 Method and apparatus for controlling plating over a face of a substrate 62 2000
6,622,103 System for calibrating timing of an integrated circuit wafer tester 90 2000
6,603,323 Closed-grid bus architecture for wafer interconnect structure 86 2000
6,727,580 Microelectronic spring contact elements 75 2000
6,539,531 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 106 2000
6,835,898 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 75 2000
6,778,406 Resilient contact structures for interconnecting electronic devices 96 2000
6,475,822 Method of making microelectronic contact structures 87 2000
6,597,187 Special contact points for accessing internal circuitry of an integrated circuit 73 2000
6,603,324 Special contact points for accessing internal circuitry of an integrated circuit 70 2000
6,606,575 Cross-correlation timing calibration for wafer-level IC tester interconnect systems 81 2000
6,621,260 Special contact points for accessing internal circuitry of an integrated circuit 75 2000
6,701,612 Method and apparatus for shaping spring elements 83 2000
6,713,374 Interconnect assemblies and methods 94 2000
6,836,962 Method and apparatus for shaping spring elements 70 2000
6,538,538 High frequency printed circuit board via 79 2001
6,791,176 Lithographic contact elements 77 2001
6,616,966 Method of making lithographic contact springs 121 2001
6,780,001 Forming tool for forming a contoured microelectronic spring mold 70 2001
6,501,343 Integrated circuit tester with high bandwidth probe assembly 88 2001
6,606,014 Filter structures for integrated circuit interfaces 61 2001
6,534,856 Sockets for "springed" semiconductor devices 86 2001
6,910,268 Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via 104 2001
6,856,150 Probe card with coplanar daughter card 82 2001
6,627,980 Stacked semiconductor device assembly with microelectronic spring contacts 76 2001
6,538,214 Method for manufacturing raised electrical contact pattern of controlled geometry 74 2001
6,882,239 Electromagnetically coupled interconnect system 78 2001
6,888,362 Test head assembly for electronic components with plurality of contoured microelectronic spring contacts 86 2001
6,729,019 Method of manufacturing a probe card 94 2001
6,678,876 Process and apparatus for finding paths through a routing space 89 2001
6,862,727 Process and apparatus for adjusting traces 64 2001
6,764,869 Method of assembling and testing an electronics module 69 2001
6,714,828 Method and system for designing a probe card 72 2001
6,882,546 Multiple die interconnect system 71 2001
6,664,628 Electronic component overlapping dice of unsingulated semiconductor wafer 68 2001
6,456,103 Apparatus for reducing power supply noise in an integrated circuit 83 2001
6,759,311 Fan out of interconnect elements attached to semiconductor wafer 68 2001
6,817,052 Apparatuses and methods for cleaning test probes 76 2001
6,816,031 Adjustable delay transmission line 68 2001
6,624,648 Probe card assembly 100 2001
6,777,319 Microelectronic spring contact repair 73 2001
6,479,308 Semiconductor fuse covering 68 2001
6,615,485 Probe card assembly and kit, and methods of making same 83 2001
6,891,385 Probe card cooling assembly with direct cooling of active electronic components 77 2001
7,002,363 Method and system for compensating thermally induced motion of probe cards 115 2001
6,741,092 Method and system for detecting an arc condition 61 2001
6,864,105 Method of manufacturing a probe card 66 2002
6,680,659 Integrated circuit interconnect system 67 2002
6,784,674 Test signal distribution system for IC tester 74 2002
6,798,225 Tester channel to multiple IC terminals 76 2002
6,825,422 Interconnection element with contact blade 71 2002
6,812,691 Compensation for test signal degradation due to DUT fault 68 2002
6,640,415 Segmented contactor 100 2002
6,657,455 Predictive, adaptive power supply for an integrated circuit under test 78 2002
6,807,734 Microelectronic contact structures, and methods of making same 76 2002
6,559,671 Efficient parallel testing of semiconductor devices using a known good device to generate expected responses 72 2002
6,646,520 Integrated circuit interconnect system 69 2002
6,839,964 Method for manufacturing a multi-layer printed circuit board 64 2002
6,686,754 Integrated circuit tester with high bandwidth probe assembly 70 2002
6,678,850 Distributed interface for parallel testing of multiple devices using a single tester channel 72 2002
6,818,840 Method for manufacturing raised electrical contact pattern of controlled geometry 65 2002
6,642,625 Sockets for "springed" semiconductor devices 64 2002
6,661,316 High frequency printed circuit board via 67 2002
6,825,052 Test assembly including a test die for testing a semiconductor product die 79 2002
6,788,094 Wafer-level burn-in and test 74 2002
6,845,491 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 68 2003
6,784,677 Closed-grid bus architecture for wafer interconnect structure 64 2003
6,911,835 High performance probe system 79 2003
6,870,381 Insulative covering of probe tips 62 2003
6,911,814 Apparatus and method for electromechanical testing and validation of probe cards 69 2003
6,913,468 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods 81 2003
6,822,529 Integrated circuit interconnect system 66 2003
6,917,210 Integrated circuit tester with high bandwidth probe assembly 65 2003
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (39)
4,744,041 Method for testing DC motors 115 1985
4,831,494 Multilayer capacitor 151 1988
4,922,128 Boost clock circuit for driving redundant wordlines and sample wordlines 78 1989
4,987,100 Flexible carrier for an electronic device 80 1989
5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 130 1990
5,207,585 Thin interface pellicle for dense arrays of electrical interconnects 159 1990
5,061,192 High density connector 139 1990
5,371,654 Three dimensional high performance interconnection package 214 1992
5,441,690 Process of making pinless connector 72 1993
5,537,372 High density data storage system with topographic contact sensor 110 1993
5,531,022 Method of forming a three dimensional high performance interconnection package 146 1994
5,532,608 Ceramic probe card and method for reducing leakage current 60 1995
5,804,982 Miniature probe positioning actuator 103 1995
5,810,607 Interconnector with contact pads having enhanced durability 157 1995
5,726,211 Process for making a foamed elastometric polymer 101 1996
5,756,021 Electronic devices comprising dielectric foamed polymers 87 1996
5,700,844 Process for making a foamed polymer 128 1996
5,785,538 High density test probe with rigid surface structure 85 1996
6,268,016 Manufacturing computer systems with fine line circuitized substrates 63 1996
5,723,347 Semi-conductor chip test probe and process for manufacturing the probe 105 1996
6,286,208 Interconnector with contact pads having enhanced durability 78 1996
5,838,160 Integral rigid chip test probe 81 1996
6,054,651 Foamed elastomers for wafer probing applications and interposer connectors 78 1996
5,926,029 Ultra fine probe contacts 104 1997
6,059,982 Micro probe assembly and method of fabrication 146 1997
5,804,607 Process for making a foamed elastomeric polymer 116 1997
6,062,879 High density test probe with rigid surface structure 78 1998
6,104,201 Method and apparatus for passive characterization of semiconductor substrates subjected to high energy (MEV) ion implementation using high-injection surface photovoltage 69 1998
6,332,270 Method of making high density integral test probe 78 1998
6,404,211 Metal buckling beam probe 23 1999
6,206,273 Structures and processes to create a desired probetip contact geometry on a wafer test probe 70 1999
6,452,406 Probe structure having a plurality of discrete insulated probe tips 76 1999
6,528,984 Integrated compliant probe for wafer level test and burn-in 102 1999
6,526,655 Angled flying lead wire bonding process 63 2001
6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 101 2002
6,943,571 Reduction of positional errors in a four point probe resistance measurement 59 2003
7,007,380 TFI probe I/O wrap test method 91 2004
7,011,531 Membrane probe with anchored elements 91 2005
7,005,879 Device for probe card power bus noise reduction 91 2005
 
TOKYO ELECTRON LIMITED (33)
4,998,062 Probe device having micro-strip line structure 88 1989
5,084,671 Electric probing-test machine having a cooling system 172 1990
5,091,692 Probing test device 112 1990
5,198,752 Electric probing-test machine having a cooling system 151 1991
5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 106 1991
5,321,352 Probe apparatus and method of alignment for the same 130 1992
5,321,453 Probe apparatus for probing an object held above the probe card 100 1992
5,635,846 Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer 129 1993
5,404,111 Probe apparatus with a swinging holder for an object of examination 111 1993
5,517,126 Probe apparatus 127 1993
5,521,522 Probe apparatus for testing multiple integrated circuit dies 141 1993
5,539,676 Method of identifying probe position and probing method in prober 92 1994
5,811,982 High density cantilevered probe for electronic devices 112 1996
5,777,485 Probe method and apparatus with improved probe contact 117 1996
5,910,727 Electrical inspecting apparatus with ventilation system 88 1996
5,821,763 Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof 162 1996
5,804,983 Probe apparatus with tilt correction mechanisms 147 1997
6,334,247 High density integrated circuit apparatus, test probe and methods of use thereof 83 1997
5,914,614 High density cantilevered probe for electronic devices 94 1997
5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor 105 1997
6,060,892 Probe card attaching mechanism 92 1997
6,300,780 High density integrated circuit apparatus, test probe and methods of use thereof 74 1998
6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 127 1998
6,329,827 High density cantilevered probe for electronic devices 72 1998
6,414,478 Transfer mechanism for use in exchange of probe card 78 2000
6,722,032 Method of forming a structure for electronic devices contact locations 61 2001
7,005,842 Probe cartridge assembly and multi-probe assembly 91 2001
6,927,587 Probe apparatus 62 2003
6,906,542 Probing method and prober 59 2003
6,794,888 Probe device 74 2003
7,026,832 Probe mark reading device and probe mark reading method 92 2003
7,009,415 Probing method and probing apparatus 93 2004
7,023,226 Probe pins zero-point detecting method, and prober 91 2004
 
AGILENT TECHNOLOGIES, INC. (29)
4,980,637 Force delivery system for improved precision membrane probe 94 1988
4,918,383 Membrane probe with automatic contact scrub action 151 1988
4,906,920 Self-leveling membrane probe 201 1988
5,172,051 Wide bandwidth passive probe 103 1991
5,298,972 Method and apparatus for measuring polarization sensitivity of optical devices 106 1991
5,274,336 Capacitively-coupled test probe 129 1992
5,493,070 Measuring cable and measuring system 90 1994
5,578,932 Method and apparatus for providing and calibrating a multiport network analyzer 141 1995
5,945,836 Loaded-board, guided-probe test fixture 118 1996
5,903,143 Probe apparatus with RC circuit connected between ground and a guard 92 1997
6,060,888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers 111 1998
6,251,595 Methods and devices for carrying out chemical reactions 90 1998
6,175,228 Electronic probe for measuring high impedance tri-state logic circuits 82 1998
6,300,775 Scattering parameter calibration system and method 126 1999
6,271,673 Probe for measuring signals 101 1999
6,407,562 Probe tip terminating device providing an easily changeable feed-through termination 85 1999
2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits 77 2001
6,643,597 Calibrating a test system using unknown standards 114 2001
6,717,426 Blade-like connecting needle 77 2002
6,768,328 Single point probe structure and method 73 2002
6,864,694 Voltage probe 89 2002
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 94 2002
2004/0199,350 System and method for determining measurement errors of a testing device 92 2003
2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration 81 2003
7,025,628 Electronic probe extender 95 2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device 91 2004
6,933,713 High bandwidth oscilloscope probe with replaceable cable 54 2004
7,005,868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe 91 2004
7,026,834 Multiple two axis floating probe block assembly using split probe block 91 2005
 
CASCADE MICROTECH, INC. (29)
4,697,143 Wafer probe 195 1984
4,827,211 Wafer probe 124 1987
4,849,689 Microwave wafer probe having replaceable probe tip 124 1988
5,045,781 High-frequency active probe having replaceable contact needles 108 1991
5,266,889 Wafer probe station with integrated environment control enclosure 132 1992
5,457,398 Wafer probe station having full guarding 121 1993
5,506,515 High-frequency probe tip assembly 148 1994
5,610,529 Probe station having conductive coating added to thermal chuck insulator 134 1995
5,565,788 Coaxial wafer probe with tip shielding 143 1995
5,914,613 Membrane probing system with local contact scrub 104 1996
6,232,788 Wafer probe station for low-current measurements 86 1997
6,034,533 Low-current pogo probe card 105 1997
6,137,302 Low-current probe card with reduced triboelectric current generating cables 106 1997
6,256,882 Membrane probing system 66 1998
6,307,387 Membrane probing system with local contact scrub 14 1998
6,578,264 Method for constructing a membrane probe using a depression 76 2000
6,838,890 Membrane probing system 12 2000
6,708,386 Method for probing an electrical device having a layer of oxide thereon 15 2001
6,860,009 Probe construction using a recess 9 2001
6,549,106 Waveguide with adjustable backshort 108 2001
6,724,205 Probe for combined signals 96 2002
6,815,963 Probe for testing a device under test 63 2003
6,806,724 Probe for combined signals 93 2003
6,930,498 Membrane probing system 54 2004
7,009,383 Wafer probe station having environment control enclosure 91 2004
7,187,188 Chuck with integrated wafer support 74 2004
7,266,889 Membrane probing system 7 2005
7,148,711 Membrane probing system 12 2005
7,368,927 Probe head having a membrane suspended probe 19 2005
 
SV PROBE PTE LTD. (13)
5,521,518 Probe card apparatus 130 1991
5,180,977 Membrane probe contact bump compliancy system 139 1991
5,422,574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts 164 1993
5,720,098 Method for making a probe preserving a uniform stress distribution under deflection 107 1995
5,742,174 Membrane for holding a probe tip in proper location 124 1995
5,623,213 Membrane probing of circuits 92 1996
6,037,785 Probe card apparatus 106 1996
5,973,504 Programmable high-density electronic device testing 97 1997
6,419,500 Probe assembly having floatable buckling beam probes and apparatus for abrading the same 44 1999
6,420,887 Modulated space transformer for high density buckling beam probe and method for making the same 33 2000
6,424,164 Probe apparatus having removable beam probes 31 2000
6,525,552 Modular probe apparatus 28 2001
6,908,364 Method and apparatus for probe tip cleaning and shaping pad 55 2001
 
MICRON TECHNOLOGY, INC. (11)
4,312,117 Integrated test and assembly device 151 1979
5,634,267 Method and apparatus for manufacturing known good semiconductor die 164 1994
5,487,999 Method for fabricating a penetration limited contact having a rough textured surface 159 1994
5,686,317 Method for forming an interconnect having a penetration limited contact structure for establishing a temporary electrical connection with a semiconductor die 235 1995
5,869,974 Micromachined probe card having compliant contact members for testing semiconductor wafers 168 1996
6,181,144 Semiconductor probe card having resistance measuring circuitry and method fabrication 130 1998
6,194,720 Preparation of transmission electron microscope samples 106 1998
6,359,456 Probe card and test system for semiconductor wafers 112 2001
6,924,653 Selectively configurable microelectronic probes 57 2002
7,026,835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad 91 2002
7,009,188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same 95 2004
 
ADVANTEST CORPORATION (9)
5,172,049 IC test equipment 126 1991
5,644,248 Test head cooling system 82 1995
5,767,690 Test head cooling system 86 1997
6,191,596 Method for detecting a contact position between an object to be measured and measuring pins 79 1998
6,174,744 Method of producing micro contact structure and contact probe using same 135 2000
6,586,956 Probe contract system having planarity adjustment mechanism 33 2001
2002/0011,863 IC chip tester with heating element for preventing condensation 85 2001
7,020,360 Wavelength dispersion probing system 91 2002
6,937,040 Probe module and a testing apparatus 57 2004
 
TEKTRONIX, INC. (8)
4,673,839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations 121 1986
4,749,942 Wafer probe head 81 1987
4,912,399 Multiple lead probe for integrated circuits in wafer form 112 1987
5,059,898 Wafer probe with transparent loading member 76 1990
5,136,237 Double insulated floating high voltage test probe 102 1991
5,412,330 Optical module for an optically based measurement system 92 1993
6,447,339 Adapter for a multi-channel signal probe 83 2001
6,701,265 Calibration for vector network analyzer 90 2002
 
W. L. GORE & ASSOCIATES, INC. (8)
4,871,883 Electro-magnetic shielding 114 1987
4,859,989 Security system and signal carrying member thereof 127 1987
5,061,823 Crush-resistant coaxial transmission line 119 1990
5,107,076 Easy strip composite dielectric coaxial signal cable 117 1991
5,477,011 Low noise signal transmission cable 102 1994
5,896,038 Method of wafer level burn-in 104 1996
6,032,714 Repeatably positionable nozzle assembly 77 1999
7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 93 2003
 
CANON KABUSHIKI KAISHA (7)
4,755,747 Wafer prober and a probe card to be used therewith 105 1985
4,864,227 Wafer prober 125 1988
4,929,893 Wafer prober 158 1988
5,145,552 Process for preparing electrical connecting member 66 1990
5,304,924 Edge detector 97 1992
5,731,920 Converting adapter for interchangeable lens assembly 91 1995
5,685,232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same 112 1996
 
FREESCALE SEMICONDUCTOR, INC. (7)
5,172,050 Micromachined semiconductor probe card 269 1991
5,177,438 Low resistance probe for semiconductor 164 1991
5,467,024 Integrated circuit test with programmable source for both AC and DC modes of operation 84 1993
5,617,035 Method for testing integrated devices 108 1995
5,666,063 Method and apparatus for testing an integrated circuit 105 1996
5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 106 1997
6,127,831 Method of testing a semiconductor device by automatically measuring probe tip parameters 100 1997
 
GLOBALFOUNDRIES INC. (7)
6,091,255 System and method for tasking processing modules based upon temperature 124 1998
6,608,494 Single point high resolution time resolved photoemission microscopy system and method 107 1998
6,483,327 Quadrant avalanche photodiode time-resolved detection 103 1999
6,724,928 Real-time photoemission detection system 95 2000
6,488,405 Flip chip defect analysis using liquid crystal 97 2000
6,617,862 Laser intrusive technique for locating specific integrated circuit current paths 96 2002
7,022,976 Dynamically adjustable probe tips 93 2003
 
TEXAS INSTRUMENTS INCORPORATED (7)
5,159,752 Scanning electron microscope based parametric testing method and apparatus 117 1990
5,225,037 Method for fabrication of probe card for testing of semiconductor devices 212 1991
5,511,010 Method and apparatus of eliminating interference in an undersettled electrical signal 88 1994
6,292,760 Method and apparatus to measure non-coherent signals 91 1998
6,906,539 High density, area array probe card apparatus 54 2001
6,911,834 Multiple contact vertical probe solution enabling Kelvin connection benefits for conductive bump probing 54 2002
7,026,833 Multiple-chip probe and universal tester contact assemblage 93 2005
 
YOKOWO CO., LTD. (7)
7,019,701 Antenna device mounted on vehicle 74 2004
6,900,647 Contact probe and probe device 102 2004
6,903,563 Contact probe and probe device 96 2004
6,917,211 Contact probe and probe device 54 2004
6,919,732 Contact probe and probe device 55 2004
6,937,042 Contact probe and probe device 55 2004
7,015,710 Contact probe and probe device 93 2004
 
HUGHES ELECTRONICS CORPORATION (6)
4,772,846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy 129 1986
5,148,103 Apparatus for testing integrated circuits 146 1990
5,313,157 Probe for jesting an electrical circuit chip 91 1992
5,368,634 Removing bubbles from small cavities 24 1993
5,583,445 Opto-electronic membrane probe 99 1994
5,623,214 Multiport membrane probe for full-wafer testing 105 1996
 
SARANTEL LIMITED (6)
5,854,608 Helical antenna having a solid dielectric core 112 1994
6,184,845 Dielectric-loaded antenna 121 1997
6,181,297 Antenna 88 1998
6,369,776 Antenna 86 1999
6,424,316 Helical antenna 84 2000
6,914,580 Dielectrically-loaded antenna 80 2003
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (6)
4,983,910 Millimeter-wave active probe 68 1988
4,916,002 Microcasting of microminiature tips 133 1989
5,003,253 Millimeter-wave active probe system 75 1989
5,847,569 Electrical contact probe for sampling high frequency electrical signals 94 1996
5,981,268 Hybrid biosensors 140 1997
6,051,422 Hybrid biosensors 119 1998
 
WENTWORTH LABORATORIES, INC. (6)
4,975,638 Test probe assembly for testing integrated circuit devices 143 1989
5,355,079 Probe assembly for testing integrated circuit devices 93 1993
5,959,461 Probe station adapter for backside emission inspection 117 1997
6,031,383 Probe station for low current, low voltage parametric measurements using multiple probes 103 1998
6,160,412 Impedance-matched interconnection device for connecting a vertical-pin integrated circuit probing device to integrated circuit test equipment 62 1998
6,927,586 Temperature compensated vertical pin probing device 57 2003
 
MDS INC. (5)
6,376,258 Resonant bio-assay device and test system for detecting molecular binding events 132 2000
6,340,568 Method for detecting and classifying nucleic acid hybridization 79 2001
6,566,079 Methods for analyzing protein binding events 93 2001
2003/0032,000 Method for analyzing cellular events 87 2001
2002/0168,659 System and method for characterizing the permittivity of molecular events 73 2002
 
MITSUBISHI DENKI KABUSHIKI KAISHA (5)
5,408,188 High frequency wafer probe including open end waveguide 74 1992
5,493,236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis 182 1994
6,144,212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card 104 1998
6,242,929 Probe needle for vertical needle type probe card and fabrication thereof 86 1998
6,404,213 Probe stylus 82 1999
 
ANRITSU COMPANY (4)
5,905,421 Apparatus for measuring and/or injecting high frequency signals in integrated systems 77 1997
6,169,410 Wafer probe with built in RF frequency conversion module 83 1998
6,529,844 Vector network measurement system 103 1999
6,943,563 Probe tone S-parameter measurements 56 2002
 
APPLIED MATERIALS, INC. (4)
5,916,689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect 105 1996
5,874,361 Method of processing a wafer within a reaction chamber 104 1996
6,257,564 Vacuum chuck having vacuum-nipples wafer support 98 1998
6,232,787 Microstructure defect detection 151 1999
 
DELAWARE CAPITAL FORMATION, INC. (4)
5,408,189 Test fixture alignment system for printed circuit boards 141 1992
5,389,885 Expandable diaphragm test modules and connectors 94 1993
6,181,149 Grid array package test contactor 95 1996
6,064,218 Peripherally leaded package test contactor 102 1997
 
GGB INDUSTRIES, INC. (4)
4,871,964 Integrated circuit probing apparatus 90 1988
5,373,231 Integrated circuit probing apparatus including a capacitor bypass structure 118 1993
6,603,322 Probe card for high speed testing 98 1996
6,118,287 Probe tip structure 95 1997
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (4)
4,839,587 Test fixture for tab circuits and devices 124 1988
5,198,753 Integrated circuit test fixture and method 123 1990
6,233,613 High impedance probe for monitoring fast ethernet LAN links 91 1997
7,002,133 Detecting one or more photons from their interactions with probe photons in a matter system 91 2003
 
INTEL CORPORATION (4)
5,944,093 Pickup chuck with an integral heat pipe 99 1997
7,020,363 Optical probe for wafer testing 92 2001
6,856,129 Current probe device having an integrated amplifier 89 2002
2006/0052,075 Testing integrated circuits using high bandwidth wireless technology 71 2004
 
NATIONAL SEMICONDUCTOR CORPORATION (4)
4,757,255 Environmental box for automated wafer probing 180 1986
5,814,847 General purpose assembly programmable multi-chip package substrate 88 1996
5,883,522 Apparatus and method for retaining a semiconductor wafer during testing 105 1996
7,096,133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise 71 2005
 
NEC CORPORATION (4)
6,114,864 Probe card with plural probe tips on a unitary flexible tongue 106 1997
6,310,483 Longitudinal type high frequency probe for narrow pitched electrodes 99 1998
6,281,691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable 100 1999
6,400,168 Method for fabricating probe tip portion composed by coaxial cable 100 2001
 
RAYTHEON COMPANY (4)
5,069,628 Flexible electrical cable connector with double sided dots 70 1990
5,395,253 Membrane connector with stretch induced micro scrub 114 1993
5,600,256 Cast elastomer/membrane test probe assembly 75 1995
6,211,837 Dual-window high-power conical horn antenna 75 1999
 
RENESAS ELECTRONICS CORPORATION (4)
6,028,435 Semiconductor device evaluation system using optical fiber 105 1997
6,160,407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same 96 1998
6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 95 2002
6,551,884 Semiconductor device including gate insulation films having different thicknesses 69 2002
 
SAMSUNG ELECTRONICS CO., LTD. (4)
6,970,001 Variable impedance test probe 72 2003
6,937,039 Tip and tip assembly for a signal probe 18 2003
6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 104 2003
6,909,297 Probe card 54 2004
 
SILICON VALLEY BANK (4)
4,893,914 Test station 110 1988
5,892,539 Portable emission microscope workstation for failure analysis 115 1995
6,744,268 High resolution analytical probe station 117 2002
6,917,195 Wafer probe station 54 2004
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (4)
4,754,239 Waveguide to stripline transition assembly 89 1986
5,631,571 Infrared receiver wafer level probe testing 132 1996
6,215,295 Photonic field probe and calibration means thereof 111 1998
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields 102 2002
 
ELECTROGLAS, INC. (3)
5,656,942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 106 1995
6,096,567 Method and apparatus for direct probe sensing 138 1997
6,320,372 Apparatus and method for testing a substrate having a plurality of terminals 99 1999
 
ENERGY, UNITED STATES DEPARTMENT OF (3)
4,287,473 Nondestructive method for detecting defects in photodetector and solar cell devices 107 1979
5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 118 1994
6,307,672 Microscope collision protection apparatus 79 1996
 
GENERAL ELECTRIC COMPANY (3)
6,927,598 Test probe for electrical devices having low or no wedge depression 55 2003
6,911,826 Pulsed eddy current sensor probes and inspection methods 61 2003
7,015,690 Omnidirectional eddy current probe and inspection system 96 2004
 
HUGHES AIRCRAFT COMPANY (3)
5,326,412 Method for electrodepositing corrosion barrier on isolated circuitry 71 1992
5,512,835 Electrical probe and method for measuring gaps and other discontinuities in enclosures using electrical inductance for RF shielding assessment 72 1992
5,412,866 Method of making a cast elastomer/membrane test probe assembly 119 1993
 
IBIDEN CO., LTD. (3)
2004/0021,475 Wafer prober 79 2003
2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device 78 2003
2004/0207,072 Ceramic substrate for a semiconductor producing/examining device 82 2004
 
INTERSTITIAL, LLC (3)
5,704,355 Non-invasive system for breast cancer detection 113 1995
5,829,437 Microwave method and system to detect and locate cancers in heterogenous tissues 117 1996
6,061,589 Microwave antenna for cancer detection system 113 1997
 
JOHN H. BLANZ COMPANY, INC. (3)
5,097,207 Temperature stable cryogenic probe station 105 1989
5,160,883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support 94 1990
5,166,606 High efficiency cryogenic test station 93 1990
 
LSI LOGIC CORPORATION (3)
6,927,079 Method for probing a semiconductor wafer 101 2000
6,605,951 Interconnector and method of connecting probes to a die for functional analysis 101 2000
7,023,225 Wafer-mounted micro-probing platform 92 2003
 
MOTOROLA, INC. (3)
4,453,142 Microstrip to waveguide transition 104 1981
4,646,005 Signal probe 97 1984
5,748,506 Calibration technique for a network analyzer 93 1996
 
NEW WAVE RESEARCH (3)
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 134 1997
6,573,702 Method and apparatus for cleaning electronic test contacts 99 1997
5,963,364 Multi-wavelength variable attenuator and half wave plate 115 1997
 
SIEMENS AKTIENGESELLSCHAFT (3)
4,275,446 Method and apparatus for measurement of attenuation and distortion by a test object 100 1979
4,805,627 Method and apparatus for identifying the distribution of the dielectric constants in an object 97 1986
5,095,891 Connecting cable for use with a pulse generator and a shock wave generator 96 1987
 
XANDEX, INC. (3)
5,528,158 Probe card changer system and method 103 1994
5,506,498 Probe card system and method 95 1995
6,166,553 Prober-tester electrical interface for semiconductor test 95 1998
 
ADVANTEST (SINGAPORE) PTE LTD (2)
6,812,718 Massively parallel interface for electronic circuits 101 2001
6,917,525 Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs 94 2002
 
ADVANTEST AMERICA, INC (2)
6,295,729 Angled flying lead wire bonding process 73 1998
6,708,403 Angled flying lead wire bonding process 65 2003
 
AEHR TEST SYSTEMS (2)
6,340,895 Wafer-level burn-in and test cartridge 99 1999
6,580,283 Wafer level burn-in and test methods 85 1999
 
AEROSPACE CORPORATION, THE (2)
6,211,663 Baseband time-domain waveform measurement method 112 1999
6,396,298 Active feedback pulsed measurement method 86 2000
 
BRUKER NANO, INC. (2)
5,376,790 Scanning probe microscope 111 1992
5,672,816 Large stage system for scanning probe microscopes and other instruments 114 1995
 
DAINIPPON SCREEN MFG. CO., LTD. (2)
4,531,474 Rotary board treating apparatus 87 1984
4,746,857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer 94 1986
 
DCG SYSTEMS, INC. (2)
5,530,372 Method of probing a net of an IC at an optimal probe-point 115 1994
5,675,499 Optimal probe point placement 106 1996
 
ELK FINANCIAL, INC. (2)
6,064,217 Fine pitch contact device employing a compliant conductive polymer bump 129 1996
2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE 104 1998
 
ELM TECHNOLOGY CORPORATION (2)
5,020,219 Method of making a flexible tester surface for testing integrated circuits 160 1989
5,453,404 Method for making an interconnection structure for integrated circuits 124 1994
 
EMIMAGING LTD (2)
5,715,819 Microwave tomographic spectroscopy system and method 101 1994
6,490,471 Electromagnetical imaging and therapeutic (EMIT) systems 85 2001
 
EUROPAISCHES LABORATORIUM FUR MOLEKULARBIOLOGIE (EMBL) (2)
6,798,226 Multiple local probe measuring device and method 88 2002
6,943,574 Multiple local probe measuring device and method 59 2004
 
HEWLETT-PACKARD COMPANY (2)
4,795,962 Floating driver circuit and a device for measuring impedances of electrical components 93 1987
5,133,119 Shearing stress interconnection apparatus and method 64 1991
 
HITACHI, LTD. (2)
7,012,871 Information recording method and apparatus with suppressed mark edge jitters 76 2004
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6,049,216 Contact type prober automatic alignment 91 1997
7,012,441 High conducting thin-film nanoprobe card and its fabrication method 102 2003
 
KABUSHIKI KAISHA NIHON MICRONICS (2)
5,888,075 Auxiliary apparatus for testing device 76 1997
6,019,612 Electrical connecting apparatus for electrically connecting a device to be tested 83 1998
 
KLA-TENCOR CORPORATION (2)
6,633,174 Stepper type test structures and methods for inspection of semiconductor integrated circuits 98 2000
6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices 125 2000
 
LUCENT TECHNOLOGIES INC. (2)
5,970,429 Method and apparatus for measuring electrical noise in devices 115 1997
6,245,692 Method to selectively heat semiconductor wafers 89 1999
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,653,939 Optical and electrical methods and apparatus for molecule detection 402 1995
5,998,768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation 98 1998
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (2)
5,794,133 Microwave mixing circuit 81 1996
6,806,836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus 73 2003
 
MICROWAVE IMAGING SYSTEMS TECHNOLOGIES, INC. (2)
5,841,288 Two-dimensional microwave imaging apparatus and methods 112 1997
6,448,788 Fixed array microwave imaging apparatus and method 98 2000
 
MOTOROLA MOBILITY LLC (2)
5,793,213 Method and apparatus for calibrating a network analyzer 92 1996
5,751,252 Method and antenna for providing an omnidirectional pattern 84 1997
 
NGK INSULATORS, LTD. (2)
5,280,156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 201 1991
6,001,760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 113 1997
 
NORTHROP GRUMMAN CORPORATION (2)
4,581,679 Multi-element circuit construction 99 1985
2005/0026,276 Remote detection and analysis of chemical and biological aerosols 77 2003
 
OLYMPUS OPTICAL CO., LTD. (2)
5,367,165 Cantilever chip for scanning probe microscope 73 1993
6,811,406 Microelectronic spring with additional protruding member 145 2001
 
RCA CORPORATION (2)
4,284,033 Means to orbit and rotate target wafers supported on planet member 112 1979
4,651,115 Waveguide-to-microstrip transition 79 1985
 
RENISHAW PLC (2)
5,270,664 Probe for measuring surface roughness by sensing fringe field capacitance effects 121 1992
6,909,983 Calibration of an analogue probe 63 2002
 
ROBERT BOSCH GMBH (2)
6,066,911 Ultrasonic driving element 117 1998
6,948,981 Compact coupler plug, particularly for a planar broadband lambda probe, in which single-conductor seals are prevented from being lost 53 2002
 
SEMATECH, INC. (2)
5,159,264 Pneumatic energy fluxmeter 78 1991
5,159,267 Pneumatic energy fluxmeter 80 1992
 
SHARP KABUSHIKI KAISHA (2)
5,089,774 Apparatus and a method for checking a semiconductor 126 1990
5,374,938 Waveguide to microstrip conversion means in a satellite broadcasting adaptor 93 1993
 
SKYWORKS SOLUTIONS, INC. (2)
6,582,979 Structure and method for fabrication of a leadless chip carrier with embedded antenna 86 2001
6,770,955 Shielded antenna in a semiconductor package 83 2001
 
SOLID STATE MEASUREMENTS, INC. (2)
6,900,652 Flexible membrane probe and method of use thereof 104 2003
7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 92 2004
 
SONY CORPORATION (2)
6,362,792 Antenna apparatus and portable radio set 76 2000
6,366,247 Antenna device and portable radio set 81 2000
 
SONY ELECTRONICS INC. (2)
5,669,316 Turntable for rotating a wafer carrier 98 1993
2007/0024,506 Systems and methods for high frequency parallel transmissions 77 2006
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,909,300 Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip having pointed tips 54 2002
6,902,941 Probing of device elements 98 2003
 
TDK CORPORATION (2)
5,510,792 Anechoic chamber and wave absorber 92 1994
7,012,425 Eddy-current probe 93 2005
 
TELEDYNE LECROY, INC. (2)
6,822,463 Active differential test probe with a transmission line input structure 74 2002
7,019,544 Transmission line input structure test probe 93 2004
 
TENCOR INSTRUMENTS (2)
4,755,746 Apparatus and methods for semiconductor wafer testing 154 1985
5,852,232 Acoustic sensor as proximity detector 116 1997
 
THE BOEING COMPANY (2)
4,727,637 Computer aided connector assembly method and apparatus 109 1987
6,914,427 Eddy current probe having sensing elements defined by first and second elongated coils and an associated inspection method 58 2003
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (2)
5,091,732 Lightweight deployable antenna system 86 1990
6,940,264 Near field probe 57 2004
 
WI-LAN INC. (2)
5,565,881 Balun apparatus including impedance transformer having transformation length 77 1994
5,628,057 Multi-port radio frequency signal transformation network 96 1996
 
XEROX CORPORATION (2)
4,780,670 Active probe card for high resolution/low noise wafer level testing 132 1985
6,352,454 Wear-resistant spring contacts 81 1999
 
YULIM HITECH, INC. (2)
6,922,069 Needle assembly of probe card 60 2003
7,014,499 Probe card for testing semiconductor device 91 2005
 
3M INNOVATIVE PROPERTIES COMPANY (1)
6,902,416 High density probe device 73 2002
 
ABBOTT LABORATORIES (1)
2005/0165,316 Method for detecting artifacts in data 74 2004
 
ACOME, SOCIETIES ANONYME (1)
4,621,169 Electric cable construction and uses therefor 92 1985
 
ADE CORPORATION (1)
5,642,298 Wafer testing and self-calibration system 105 1996
 
ADVANCED MICRO DEVICES, INC. (1)
6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 95 2000
 
ALBANY INSTRUMENTS, INC. (1)
6,933,717 Sensors and probes for mapping electromagnetic fields 57 2004
 
ALERI INC. (1)
6,924,655 Probe card for use with microelectronic components, and methods for making same 55 2003
 
ALPS ELECTRIC CO., LTD. (1)
4,725,793 Waveguide-microstrip line converter 84 1986
 
ALSTOM (1)
5,813,847 Device and method for injecting fuels into compressed gaseous media 75 1996
 
ALTERA CORPORATION (1)
5,744,383 Integrated circuit package fabrication method 25 1995
 
ANDO ELECTRIC CO., LTD. (1)
2001/0054,906 Probe card and a method of manufacturing the same 76 2001
 
ARIES ELECTRONICS, INC. (1)
6,937,045 Shielded integrated circuit probe 61 2004
 
ARRAY BIOSCIENCE CORPORATION (1)
6,707,548 Systems and methods for filter based spectrographic analysis 95 2001
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5,267,088 Code plate mounting device 82 1990
 
AT & T TECHNOLOGIES, INC., (1)
4,837,507 High frequency in-circuit test fixture 73 1987
 
ATG TEST SYSTEMS GMBH & CO. KG (1)
7,015,711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method 103 2004
 
ATMEL CORPORATION (1)
4,649,339 Integrated circuit interface 113 1984
 
AUTOCYTE NORTH CAROLINA, L.L.C. (1)
5,659,421 Slide positioning and holding device 102 1995
 
AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD. (1)
5,066,357 Method for making flexible circuit card with laser-contoured vias and machined capacitors 106 1990
 
BARKER REVOCABLE TRUST U/A/D (1)
5,202,558 Flexible fiber optic probe for high-pressure shock experiments 101 1992
 
BECHTEL BWXT IDAHO, LLC (1)
6,147,502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques 77 1998
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices 93 1985
 
BERTHOLD TECHNOLOGIES GMBH & CO. KG (1)
5,369,368 Device for determining material parameters by means of microwave measurements 78 1993
 
BILL, ELVIN STUART, 3 MARK ST., DUNDAS VALLEY, 2117 (1)
4,223,658 Elastic band projecting toy gun 50 1978
 
BIOTRONIC SYSTEMS CORPORATION (1)
5,082,627 Three dimensional binding site array for interfering with an electrical field 83 1987
 
BOARD OF REGENTS OF THE UNIVERSITY OF WISCONSIN SYSTEM, THE, AN INSTITUTE OF WI (1)
5,233,306 Method and apparatus for measuring the permittivity of materials 99 1991
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (1)
2003/0119,057 Forming and modifying dielectrically-engineered microparticles 95 2001
 
BROADCOM CORPORATION (1)
7,088,981 Apparatus for reducing flicker noise in a mixer circuit 93 2001
 
BROOKS AUTOMATION, INC. (1)
5,539,323 Sensor for articles such as wafers on end effector 115 1993
 
BRUKER BIOSPIN CORPORATION (1)
6,933,725 NMR probe circuit for generating close frequency resonances 59 2004
 
CARDIFF AND VALE NHS TRUST (1)
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation 73 2004
 
CARL-ZEISS-STIFTUNG (1)
4,515,439 Attachment of microscope objectives 77 1982
 
CERPROBE CORPORATION (1)
6,002,426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits 108 1997
 
CHENG, DAVID (1)
5,479,108 Method and apparatus for handling wafers 155 1992
 
CHIPMOS TECHNOLOGIES INC. (1)
6,946,860 Modularized probe head 54 2003
 
CIRCUIT COMPONENTS, INCORPORATED (1)
4,793,814 Electrical circuit board interconnect 254 1986
 
COMPAQ COMPUTER CORPORATION (1)
5,500,606 Completely wireless dual-access test fixture 112 1993
 
CONIFER CORPORATION (1)
5,293,175 Stacked dual dipole MMDS feed 133 1993
 
CONTEL FEDERAL SYSTEMS, INC., A DE CORP. (1)
4,184,729 Flexible connector cable 104 1977
 
CREDENCE SYSTEMS CORPORATION (1)
5,883,523 Coherent switching power for an analog circuit tester 102 1997
 
CROWN PRODUCTS, INC. (1)
7,019,541 Electric conductivity water probe 94 2004
 
CSI TECHNOLOGY, INC. (1)
6,091,236 System and method for measuring and analyzing electrical signals on the shaft of a machine 93 1997
 
D-LINK CORPORATION (1)
6,778,140 Atch horn antenna of dual frequency 71 2003
 
DATA PROBE CORPORATION (1)
4,588,950 Test system for VLSI digital circuit and method of testing 91 1983
 
DELPHI TECHNOLOGIES, INC. (1)
7,015,709 Ultra-broadband differential voltage probes 97 2004
 
DESIGNTECH INTERNATIONAL, INC. (1)
5,041,782 Microstrip probe 94 1989
 
DH TECHNOLOGIES DEVELOPMENT PTE. LTD. (1)
6,627,461 Method and apparatus for detection of molecular events using temperature control of detection environment 89 2001
 
DIMENSION POLYANT SAILCLOTH, INC. (1)
6,013,586 Tent material product and method of making tent material product 88 1997
 
DIT-MCO INTERNATIONAL CORPORATION (1)
4,357,575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies 114 1980
 
DYNEX SEMICONDUCTOR LIMITED (1)
6,265,950 Transition from a waveguide to a strip transmission line 84 1999
 
EADS DEUTSCHLAND GMBH (1)
6,636,182 Structural antenna for flight aggregates or aircraft 72 2001
 
EASTMAN KODAK COMPANY (1)
5,848,500 Light-tight enclosure and joint connectors for enclosure framework 101 1997
 
EATON CORPORATION (1)
4,904,935 Electrical circuit board text fixture having movable platens 111 1988
 
EDO CORPORATION, BARNES DIVISION (1)
4,755,874 Emission microscopy system 154 1987
 
ELECTRIC POWER RESEARCH INSTITUTE, INC. (1)
4,487,996 Shielded electrical cable 103 1982
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (1)
6,100,815 Compound switching matrix for probing and interconnecting devices under test to measurement equipment 90 1997
 
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer 98 2002
 
ENDEVCO CORPORATION (1)
5,214,243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid 123 1991
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5,214,374 Dual level test fixture 99 1991
 
FAIRCHILD SEMICONDUCTOR CORPORATION (1)
5,357,211 Pin driver amplifier 81 1993
 
FILOTEX (1)
5,397,855 Low noise cable 92 1993
 
FLUKE CORPORATION (1)
6,384,614 Single tip Kelvin probe 100 2000
 
FORMFACTOR, ET AL. (1)
6,937,037 Probe card assembly for contacting a device with raised contact elements 59 2002
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6,653,903 Supply voltage decoupling device for HF amplifier circuits 71 2001
 
FRESH QUEST CORPORATION (1)
5,589,781 Die carrier apparatus 72 1993
 
FUJI PHOTO FILM CO., LTD. (1)
4,727,391 Sheet film package and device for loading sheet films 80 1987
 
FUJIKURA LTD. (1)
4,626,618 DC electric power cable 97 1985
 
FUJIKURA RUBBER WORKS, LTD. (1)
4,425,395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production 95 1982
 
FUJITA, TAKAFUMI (1)
6,933,736 Prober 56 2003
 
FUJITSU LIMITED (1)
6,917,732 Connecting method of optical function devices, and optical apparatus 9 2004
 
GATAN, INC. (1)
6,914,244 Ion beam milling system and method for electron microscopy specimen preparation 78 2004
 
GCB INDUSTRIES, INC. (1)
6,229,327 Broadband impedance matching probe 101 1997
 
GE CAPITAL EQUITY INVESTMENTS, INC. (1)
6,628,980 Apparatus, systems, and methods for in vivo magnetic resonance imaging 123 2001
 
GEBR. MARZHAUSER WETZLAR OHG (1)
4,552,033 Drive system for a microscope stage or the like 105 1984
 
GENERAL DIELECTRIC, INC. (1)
2002/0050,828 Multi-feed microwave reflective resonant sensors 76 2001
 
GENERAL ELECTRIC MEDICAL SYSTEMS ISRAEL LTD., AN ISRAEL CORPORATION AFFILIATED WITH GENERAL ELECTRIC COMPANY (1)
4,691,163 Dual frequency surface probes 111 1985
 
GENERAL MOTORS CORPORATION (1)
4,277,741 Microwave acoustic spectrometer 81 1979
 
GENETRONICS, INC. (1)
5,869,326 Electroporation employing user-configured pulsing scheme 113 1996
 
GILLESPIE, ROBB S. (1)
6,481,939 Tool tip conductivity contact sensor and method 86 2001
 
GOOGLE INC. (1)
6,078,500 Pluggable chip scale package 103 1998
 
GTE VALERON CORPORATION (1)
4,401,945 Apparatus for detecting the position of a probe relative to a workpiece 95 1981
 
GYRUS MEDICAL LIMITED (1)
6,409,724 Electrosurgical instrument 99 2000
 
H+W TEST PRODUCTS, INC. (1)
6,054,869 Bi-level test fixture for testing printed circuit boards 93 1998
 
HAMAMATSU PHOTONICS K.K. (1)
4,922,186 Voltage detector 80 1988
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7,035,738 Probe designing apparatus and probe designing method 92 2002
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6,734,687 Apparatus for detecting defect in device and method of detecting defect 107 2001
 
HOUSTON ADVANCED RESEARCH CENTER, A CORP. OF TX (1)
5,846,708 Optical and electrical methods and apparatus for molecule detection 271 1992
 
HP HOLDINGS THREE, INC. (1)
5,995,914 Method and apparatus for asynchronously measuring frequency shifted signals 99 1996
 
HYNIX SEMICONDUCTOR INC. (1)
7,002,364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same 94 2003
 
HYPERVISION, INC. (1)
5,475,316 Transportable image emission microscope 129 1993
 
HYPRES, INC. (1)
4,894,612 Soft probe for providing high speed on-wafer connections to a circuit 153 1988
 
INIZIATIVE MARITTIME 1991 S.R.L. (1)
5,245,292 Method and apparatus for sensing a fluid handling 73 1992
 
INTEGRAL TECHNOLOGIES, INC. (1)
7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 93 2004
 
INTEGRATED TECHNOLOGY CORPORATION (1)
6,118,894 Integrated circuit probe card inspection system 113 1997
 
INTERMEC IP CORP. (1)
6,236,223 Method and apparatus for wireless radio frequency testing of RFID integrated circuits 148 1999
 
INTERSIL CORPORATION (1)
4,528,504 Pulsed linear integrated circuit tester 95 1982
 
INTEST CORPORATION (1)
5,900,737 Method and apparatus for automated docking of a test head to a device handler 112 1996
 
INTEST IP CORPORATION (1)
4,705,447 Electronic test head positioner for test systems 127 1985
 
IWASAKI CORRESPOND INDUSTRY CO., LTD. (1)
6,933,737 Probe card 54 2003
 
J.A. WOOLLAM CO., INC. (1)
6,937,341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 79 2002
 
JEOL RESONANCE INC. (1)
6,914,430 NMR probe 56 2004
 
JPK INSTRUMENTS AG (1)
7,022,985 Apparatus and method for a scanning probe microscope 97 2002
 
JUNKOSHA CO., LTD. (1)
4,567,321 Flexible flat cable 99 1984
 
KABUSHIKI KAISHA TOSHIBA (1)
7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 91 2004
 
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OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (27)
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4,284,682 Heat sealable, flame and abrasion resistant coated fabric 122 1980
4,383,217 Collinear four-point probe head and mount for resistivity measurements 84 1981
4,641,659 Medical diagnostic microwave scanning apparatus 105 1982
4,515,133 Fuel economizing device 75 1984
4,812,754 Circuit board interfacing apparatus 115 1987
4,711,563 Portable collapsible darkroom 88 1987
4,791,363 Ceramic microstrip probe blade 135 1987
5,363,050 Quantitative dielectric imaging system 102 1990
5,414,565 Tilting kinematic mount 83 1991
5,187,443 Microwave test fixtures for determining the dielectric properties of a material 77 1992
5,584,608 Anchored cable sling system 82 1994
5,451,722 Printed circuit board with metallized grooves 50 1994
5,670,322 Multi site molecule detection method 163 1995
5,670,888 Method for transporting and testing wafers 124 1995
5,744,971 Device and apparatus for measuring dielectric properties of materials 86 1995
5,831,442 Handling device 94 1996
5,675,932 Plant growing system 89 1996
5,949,579 Flexible darkness adapting viewer 87 1997
6,147,851 Method for guarding electrical regions having potential gradients 89 1999
6,327,034 Apparatus for aligning two objects 88 1999
6,548,311 Device and method for detecting analytes 98 2000
2001/0002,794 Split resistor probe and method 77 2001
6,587,327 Integrated broadband ceramic capacitor array 103 2002
2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives 80 2002
7,015,707 Micro probe 107 2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT 94 2004

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