Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
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United States of America Patent
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Mar 23, 2010
Grant Date -
Feb 1, 2007
app pub date -
Mar 15, 2006
filing date -
Apr 1, 2005
priority date (Note) -
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Abstract
Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.
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Cited Art Landscape
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