Instrument per pin test head
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United States of America Patent
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-
Mar 23, 2010
Grant Date -
N/A
app pub date -
Sep 5, 2008
filing date -
Sep 5, 2008
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A test head for testing a DUT includes a probe card having a plurality of DUT probes, the probes being in contact with the DUT during the testing; an instrument carrier, the instrument carrier being located above the DUT during the testing; and a SMU mounted on the carrier for each of the probes, each SMU being operably connectable to a respective probe, wherein the carrier is moved with respect to the probe card to permit replacement of the probe card.
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