MEMS using filler material and method
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United States of America Patent
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Mar 23, 2010
Grant Date -
Mar 30, 2006
app pub date -
Aug 22, 2005
filing date -
Sep 27, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
Described is an apparatus, method for manufacturing, and systems comprising a MEMS device, for example, an interferometric modulator, comprising a substrate, a movable mirror, a deformable layer, and a support structure. In some embodiments, the support structure comprises a plurality of support posts. A connector secures the movable mirror secured to the deformable layer. At least one of the connector and the support post is a composite comprising a first component and a second component, where at the first component forms at least a portion of at least one of the perimeter of the connector and support post.
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