Refining apparatus for scrap silicon using an electron beam
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United States of America Patent
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Mar 30, 2010
Grant Date -
Jan 26, 2006
app pub date -
Jun 2, 2005
filing date -
Jun 3, 2004
priority date (Note) -
Expired
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Abstract
A refining apparatus for scrap silicon using an electron beam which is suitable for recycling of scrap silicon which is formed during the manufacture of silicon products such as silicon wafers includes a vacuum chamber, a crucible installed within the vacuum chamber, a hearth which is installed next to the crucible within the vacuum chamber and which receives granular scrap silicon and which melts granular silicon by irradiation with an electron beam and which supplies molten silicon to the crucible, and a raw material supply apparatus which is installed within the vacuum chamber and which stores a prescribed amount of granular scrap silicon and supplies the stored granular scrap silicon via a chute.
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