Pre-patterned thin film capacitor and method for embedding same in a package substrate

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United States of America Patent

PATENT NO 7687366
APP PUB NO 20070065973A1
SERIAL NO

11601101

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Abstract

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An embedded passive structure, its method of formation, and its integration onto a substrate during fabrication are disclosed. In one embodiment, the embedded passive structure is a thin film capacitor (TFC) formed using a thin film laminate that has been mounted onto a substrate. The TFC's capacitor dielectric and/or lower electrode layers are patterned in such a way as to reduce damage and improve cycle time. In one embodiment, the capacitor dielectric has a high dielectric constant and the substrate is an organic packaging substrate.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATIONSANTA CLARA CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Min, Yongki Phoenix, US 44 310

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