Metal / metal nitride barrier layer for semiconductor device applications

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7687909
SERIAL NO

11809153

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A metal/metal nitride barrier layer for semiconductor device applications. The barrier layer is particularly useful in contact vias where high conductivity of the via is important, and a lower resistivity barrier layer provides improved overall via conductivity.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INCCALIFORNIA USA CALIFORNIA

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fusen E Saratoga, US 54 947
Chiang, Tony Santa Clara, US 137 4671
Chin, Barry L Saratoga, US 51 2796
Ding, Peijun Saratoga, US 132 3424
Forster, John C San Francisco, US 98 3047
Fu, Jianming Palo Alto, US 136 4865
Gopalraja, Praburam San Jose, US 101 3789
Kohara, Gene Y Fremont, US 19 480
Rengarajan, Suraj San Jose, US 32 693
Tang, Xianmin San Jose, US 168 2484
Xu, Zheng Pleasanton, US 334 5242
Yao, Gongda Fremont, US 37 832
Zhang, Hong Fremont, US 882 11808

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation