Probe station

United States of America Patent

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Mar 30, 2010
Grant Date
Feb 21, 2008
app pub date
Oct 18, 2007
filing date
Sep 5, 2000

priority date (Note)
Expired

status (Latency Note)

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Abstract

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A probe station for testing a wafer.

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Patent Owner(s)

Patent Owner	Address
CASCADE MICROTECH INC	2430 NW 206TH AVENUE BEAVERTON OR 97006

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Dunklee, John	Tigard, US	36	578
Nordgren, Greg	Wilsonville, US	10	324

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Probe station

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United States of America Patent

11975174

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PATENT NO	7688062
APP PUB NO	20080042670A1
SERIAL NO	11975174
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 30, 2010	US,7688062,B2 US7688062B2	GRANTED PATENT AS SECOND PUBLICATION
February 21, 2008	US,20080042670,A1 US20080042670A1	FIRST PUBLISHED PATENT APPLICATION

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11975174

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