Chuck with integrated wafer support
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United States of America Patent
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-
Mar 30, 2010
Grant Date -
Jul 3, 2008
app pub date -
Mar 10, 2008
filing date -
Dec 24, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved chuck with lift pins within a probe station. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck assembly.
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