Electrode and interconnect materials for MEMS devices
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United States of America Patent
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Mar 30, 2010
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May 5, 2008
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May 3, 2006
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Abstract
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.
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