Fiber optic pressure sensor for catheter use
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United States of America Patent
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Mar 30, 2010
Grant Date -
Jun 22, 2006
app pub date -
May 27, 2005
filing date -
Dec 22, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
The invention provides a miniature robust fiber optic pressure sensor. The miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an optical fiber. The invention provides a new sensor design that reduces the amount of adhesive required to bond the optical fiber to the Fabry-Perot sensor such that the sensor is less sensitive to moisture. The invention also provides manufacturing methods of the sensor comprising a method based on etching and a method based on using an excimer laser. The invention also provides a chip design that renders the chip less sensitive to thermal changes. The invention also provides a chip design in which a sensor diaphragm has a well-defined thickness. The invention also provides a chip design that protects the chip from etching.
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