Magnesium oxide single crystal and method for producing the same

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United States of America Patent

PATENT NO 7691200
APP PUB NO 20090053131A1
SERIAL NO

11909505

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Abstract

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kg/kg or less, wherein the MgO single crystal has a variation of 30% or less in terms of a CV value in detected amounts of calcium fragment ions, as analyzed by TOF-SIMS with respect to the polished surface of the MgO single crystal. A MgO single crystal deposition material and a MgO single crystal substrate for forming a thin film obtained from the MgO single crystal.

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Patent Owner(s)

Patent OwnerAddress
TATEHO CHEMICAL INDUSTRIES CO LTDAKO-SHI HYOGO 678-0239

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawaguchi, Yoshifumi Hyogo, JP 31 441
Kunishige, Masaaki Hyogo, JP 4 10
Toutsuka, Atsuo Hyogo, JP 4 13

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