End effector gripper arms having corner grippers which reorient reticle during transfer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 13, 2010
Issued Date -
N/A
app pub date -
Jul 14, 2004
filing date -
Jul 14, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention is a pod opener having an end effector which: a. grips and releases a reticle supported above the base of a pod; and b. while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, reorients the reticle. In one embodiment, the pod opener reorients the reticle by rotating it about a single axis disposed substantially perpendicular to its patterned surface. In another embodiment, the present invention is a pod opener which while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, in addition to effecting rotation substantially perpendicular to a reticle's patterned surface, also turns the reticle over so a patterned surface of the reticle is oriented for proper focus within the IC photolithography tool.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully