Methods and apparatus for sensing characteristics of the contents of a process abatement reactor

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United States of America Patent

PATENT NO 7700049
APP PUB NO 20070172399A1
SERIAL NO

11555000

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Abstract

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In certain embodiments, an apparatus is provided for use in removing pollutants from a gas stream. The apparatus includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. At least one of the stacked ceramic sections may be adapted to allow sensing of a characteristic of contents of the central chamber. In some embodiments, waste gas inlets to the thermal reaction unit may be angled to create a helical vortex within the thermal reaction unit. Other aspects are provided.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Daniel O Pleasanton, US 65 1257
Crawford, Shaun W San Ramon, US 21 599
Raoux, Sebastien Santa Clara, US 33 2361
Vermeulen, Robert M Pleasant Hill, US 6 281

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