US Patent No: 7,704,772

Number of patents in Portfolio can not be more than 2000

Method of manufacture for microelectromechanical devices

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ALSO PUBLISHED AS: 20090068781
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A method of manufacturing a microelectromechanical device includes forming at least two conductive layers on a substrate. An isolation layer is formed between the two conductive layers. The conductive layers are electrically coupled together and then the isolation layer is removed to form a gap between the conductive layers. The electrical coupling of the layers mitigates or eliminates the effects of electrostatic charge build up on the device during the removal process.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Batey, John - 24 741
Chui, Clarence San Jose, CA 269 4460
Gally, Brian James San Rafael, CA 12 259
Kothari, Manish Cupertino, CA 262 2930
Tung, Ming-Hau San Francisco, CA 112 1558

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (43)
6,040,937 Interferometric modulation 573 1996
6,674,562 Interferometric modulation of radiation 596 1998
6,055,090 Interferometric modulation 423 1999
7,123,216 Photonic MEMS and structures 482 1999
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
6,710,908 Controlling micro-electro-mechanical cavities 307 2002
7,126,738 Visible spectrum modulator arrays 116 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
6,912,022 Optical interference color display and optical interference modulator 227 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
6,982,820 Color changeable pixel 144 2003
7,198,973 Method for fabricating an interference display unit 89 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 188 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
6,958,847 Structure of an optical interference display unit 198 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 190 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 187 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
7,236,284 Photonic MEMS and structures 82 2005
2006/0268,388 Movable micro-electromechanical device 50 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
2006/0262,380 MEMS devices with stiction bumps 63 2006
2007/0177,247 Method and device for modulating light with multiple electrodes 74 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 81 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 81 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 75 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 78 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2009/0080,060 SEPARABLE MODULATOR 49 2008
 
TEXAS INSTRUMENTS INCORPORATED (15)
4,441,791 Deformable mirror light modulator 589 1982
4,956,619 Spatial light modulator 553 1988
5,028,939 Spatial light modulator system 369 1989
4,954,789 Spatial light modulator 525 1989
5,096,279 Spatial light modulator and method 474 1990
5,818,095 High-yield spatial light modulator with light blocking layer 287 1992
5,285,196 Bistable DMD addressing method 110 1992
5,452,138 Deformable mirror device with integral color filter 131 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 381 1993
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 284 1994
5,485,304 Support posts for micro-mechanical devices 118 1994
5,526,951 Fabrication method for digital micro-mirror devices using low temperature CVD 53 1994
5,646,768 Support posts for micro-mechanical devices 288 1995
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 143 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 173 2001
 
LUCENT TECHNOLOGIES INC. (8)
5,636,052 Direct view display based on a micromechanical modulation 290 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 306 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 262 1996
5,838,484 Micromechanical optical modulator with linear operating characteristic 180 1996
5,808,781 Method and apparatus for an improved micromechanical modulator 137 1997
5,786,927 Gas-damped micromechanical structure 105 1997
5,914,804 Double-cavity micromechanical optical modulator with plural multilayer mirrors 162 1998
5,949,571 Mars optical modulators 80 1998
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
4,672,254 Surface acoustic wave devices and method of manufacture thereof 80 1985
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 333 1989
5,771,321 Micromechanical optical switch and flat panel display 247 1996
 
SEIKO EPSON CORPORATION (3)
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 82 2001
6,438,282 Optical switching device and image display device 129 2001
7,034,981 Optical modulator, display device and manufacturing method for same 81 2004
 
SHARP KABUSHIKI KAISHA (3)
4,859,060 Variable interferometric device and a process for the production of the same 361 1986
5,734,177 Semiconductor device, active-matrix substrate and method for fabricating the same 89 1996
6,002,661 Deformable mirror and optical data reproducing apparatus using the same 26 1997
 
HONEYWELL INC. (2)
5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 343 1994
5,528,707 Bidirectional optical modulator having lightwave signal conservation 17 1994
 
SILICON LIGHT MACHINES CORPORATION (2)
6,466,354 Method and apparatus for interferometric modulation of light 253 2000
6,813,059 Reduced formation of asperities in contact micro-structures 65 2002
 
TERAVICTA TECHNOLOGIES, INC. (2)
6,707,355 Gradually-actuating micromechanical device 10 2001
6,787,438 Device having one or more contact structures interposed between a pair of electrodes 57 2001
 
U.S. PHILIPS CORPORATION (2)
4,403,248 Display device with deformable reflective medium 322 1981
4,681,403 Display device with micromechanical leaf spring switches 213 1986
 
VENTURE LENDING & LEASING IV, INC. (2)
6,356,378 Double substrate reflective spatial light modulator 239 2000
6,844,959 Spatial light modulators with light absorbing areas 118 2002
 
WISPRY, INC. (2)
6,876,047 MEMS device having a trilayered beam and related methods 9 2002
6,876,482 MEMS device having contact and standoff bumps and related methods 49 2002
 
AKZO N.V. (1)
5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity 200 1993
 
CHEETAH OMNI, LLC (1)
6,407,851 Micromechanical optical switch 164 2000
 
CORNING INCORPORATED (1)
2003/0210,851 MEMS OPTICAL SWITCH ACTUATOR 72 2000
 
DISCO CORPORATION (1)
6,433,917 Light modulation device and system 158 2000
 
EASTMAN KODAK COMPANY (1)
5,881,449 Method of making a microceramic electromagnetic light shutter 10 1997
 
ECHELLE, INC. (1)
5,661,592 Method of making and an apparatus for a flat diffraction grating light valve 219 1995
 
ENERGY, UNITED STATES DEPARTMENT OF (1)
4,880,493 Electronic-carrier-controlled photochemical etching process in semiconductor device fabrication 55 1988
 
FSI INTERNATIONAL, INC. (1)
6,065,424 Electroless deposition of metal films with spray processor 87 1996
 
FUJI PHOTO FILM CO., LTD. (1)
6,327,071 Drive methods of array-type light modulation element and flat-panel display 241 1999
 
GENERAL ELECTRIC COMPANY (1)
5,454,904 Micromachining methods for making micromechanical moving structures including multiple contact switching system 107 1994
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (1)
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
 
HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 178 1994
 
HOYA CORPORATION (1)
6,353,489 Optical retro-reflection device 11 2000
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
6,262,697 Display having viewable and conductive images 76 1998
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
6,917,268 Lateral microelectromechanical system switch 10 2001
 
INTPAX, INC. (1)
6,556,338 MEMS based variable optical attenuator (MBVOA) 67 2001
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 275 1999
 
JAPAN ELECTRONIC INDUSTRY DEVELOPMENT ASSOCIATION (1)
4,425,572 Thin film transistor 49 1981
 
JDS FITEL INC. (1)
6,154,586 Optical switch mechanism 51 1998
 
JDS UNIPHASE CORPORATION (1)
2003/0053,078 Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators 141 2001
 
KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (1)
6,661,561 High frequency deformable mirror device 84 2001
 
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (1)
6,791,735 Differentially-driven MEMS spatial light modulator 20 2003
 
LG DISPLAY CO., LTD. (1)
6,607,935 Method for fabricating array substrate for X-ray detector 9 2000
 
LOCKHEED MARTIN CORPORATION (1)
4,982,184 Electrocrystallochromic display and element 338 1989
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5,920,418 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 106 1995
 
MEMLINK LTD. (1)
6,535,663 Microelectromechanical device with moving element 34 2000
 
MEMS OPTICAL, INC. (1)
6,384,952 Vertical comb drive actuated deformable mirror device and method 110 1998
 
MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
6,608,268 Proximity micro-electro-mechanical system 167 2002
 
NORTHEASTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 358 1996
 
NORTHROP CORPORATION (1)
5,170,283 Silicon spatial light modulator 153 1991
 
NUVOTRONICS, LLC (1)
6,698,295 Microstructures comprising silicon nitride layer and thin conductive polysilicon layer 75 2000
 
OPTRON SYSTEMS, INC. (1)
5,471,341 Membrane light modulating systems 156 1993
 
POPKIN FAMILY ASSETS, L.L.C. (1)
6,597,490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 133 2001
 
QUALCOMM INCORPORATED (1)
2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 195 2003
 
QUANTUM DIAGNOSTICS LTD. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 274 1986
 
SANDIA CORPORATION (1)
5,867,302 Bistable microelectromechanical actuator 332 1997
 
SEIKO INSTRUMENTS R&D CENTER INC. (1)
6,323,923 Reflective type LCD having a solar cell formed of same material and same surface as an active element 20 1999
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6,841,081 Method for manufacturing reflective spatial light modulator mirror devices 74 2003
 
TANDY CORPORATION (1)
5,014,259 Recording medium having an insulating layer 14 1989
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
5,677,783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 98 1995
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
7,053,737 Stress bimorph MEMS switches and methods of making same 68 2002
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (1)
6,028,689 Multi-motion micromirror 242 1997
 
THOMSON-CSF (1)
4,896,033 Array of optically-controlled elements for the diffusion of electromagnetic energy 32 1989
 
TYCO ELECTRONICS LOGISTICS AG (1)
5,673,785 Micromechanical relay 48 1995
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
6,940,630 Vertical displacement device 70 2004
 
VAISALA OY (1)
5,646,729 Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer 113 1995
 
WASHINGTON STATE UNIVERSITY (1)
7,235,914 Piezoelectric micro-transducers, methods of use and manufacturing methods for same 11 2001
 
XEROX CORPORATION (1)
6,807,892 Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement 8 2002
 
YAMAHA CORPORATION (1)
5,795,208 Manufacture of electron emitter by replica technique 24 1995
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (4)
4,895,500 Micromechanical non-reverse valve 50 1989
5,091,983 Optical modulation apparatus and measurement method 135 1989
5,315,370 Interferometric modulator for optical signal processing 120 1991
2006/0220,160 Structure of a structure release and a method for manufacturing the same 71 2005

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (9)
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 1 2007
8,358,266 Light turning device with prismatic light turning features 0 2009
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
 
UNITED MICROELECTRONICS CORP. (2)
7,795,056 Semiconductor device and method of fabricating the same 0 2008
8,101,987 Semiconductor device and method of fabricating the same 1 2010

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