Fabrication of a micro-electromechanical system (MEMS) device from a complementary metal oxide semiconductor (CMOS)

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United States of America Patent

PATENT NO 7704868
APP PUB NO 20080169553A1
SERIAL NO

11911478

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Abstract

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Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.GAINESVILLE, FL1021

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ngo, Khai D T Blacksburg, US 13 540
Xie, Huikai Gainesville, US 31 449

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NEC CORPORATION (1)
* 6858079 Self-assembled photonic crystals and methods for manufacturing same 15 2001
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 5863835 Methods of forming electrical interconnects on semiconductor substrates 18 1997
* Cited By Examiner

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