US Patent No: 7,704,868

Number of patents in Portfolio can not be more than 2000

Fabrication of a micro-electromechanical system (MEMS) device from a complementary metal oxide semiconductor (CMOS)

ALSO PUBLISHED AS: 20080169553

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Abstract

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Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.GAINESVILLE, FL866

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ngo, Khai D T Gainesville, FL 14 361
Xie, Huikai Gainesville, FL 47 257

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NEC CORPORATION (1)
* 6,858,079 Self-assembled photonic crystals and methods for manufacturing same 12 2001
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 5,863,835 Methods of forming electrical interconnects on semiconductor substrates 18 1997
* Cited By Examiner

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