US Patent No: 7,704,868
Number of patents in Portfolio can not be more than 2000
Fabrication of a micro-electromechanical system (MEMS) device from a complementary metal oxide semiconductor (CMOS)
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Apr 27, 2010
Issued date -
Apr 11, 2006
filing date -
11/911,478
serial no -
In Force
status
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Abstract
Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 6,858,079 Self-assembled photonic crystals and methods for manufacturing same | 11 | 2001 | |
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| 5,863,835 Methods of forming electrical interconnects on semiconductor substrates | 17 | 1997 | |
Patent Citation Ranking
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