Defect inspection and charged particle beam apparatus
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United States of America Patent
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Apr 27, 2010
Grant Date -
Jun 19, 2008
app pub date -
Feb 12, 2008
filing date -
May 31, 2004
priority date (Note) -
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Abstract
In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.
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