Exposure system
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United States of America Patent
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Apr 27, 2010
Grant Date -
Nov 2, 2006
app pub date -
Apr 17, 2006
filing date -
Apr 19, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In an exposure system for substrate members which bear a photosensitive coating on a substrate surface, comprising a machine frame, a substrate carrier bearing the substrate member and an exposure device, wherein the substrate member and the exposure device can be moved relative to one another such that the photosensitive coating can be exposed as a result of this relative movement, it is suggested for an exposure of the photosensitive coating which is as precise as possible that the exposure device have an optics slide which can be moved in the second direction and on which an optical imaging device for the exposure of the substrate member is arranged, and that the exposure device have a light source unit which is arranged on the machine frame separately from the optics slide and has a plurality of light sources, the radiation of which can be coupled into the optical imaging device.
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