Diaphragm pump and manufacturing device of electronic component
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United States of America Patent
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-
May 11, 2010
Grant Date -
Feb 28, 2008
app pub date -
May 2, 2005
filing date -
May 13, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
arranged corresponding to the respective recesses with the diaphragm interposed therebetween; and a pressing member drive controller adapted to execute a liquid discharging operation and a liquid sucking operation at a predetermined timing defined for each of the pressing rods, in which in the liquid discharging operation, each of the pressing rods is moved toward the respective recesses so as to gradually decease the volume of the respective valve chambers and the metering chamber and eventually hermetically seal the metering chamber; while in the liquid discharging operation, each of the pressing rods is moved away from the respective recesses so as to gradually decease the volume of the respective valve chambers and the metering chamber.
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