Methods for thinning semiconductor substrates that employ support structures formed on the substrates
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United States of America Patent
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May 11, 2010
Grant Date -
Mar 24, 2005
app pub date -
Sep 19, 2003
filing date -
Sep 19, 2003
priority date (Note) -
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Abstract
A support structure for use with a semiconductor substrate in thinning, or backgrinding, thereof, as well as during post-thinning processing of the semiconductor substrate includes a portion which extends substantially along and around an outer periphery of the semiconductor substrate to impart the thinned semiconductor substrate with rigidity. The support structure may be configured as a ring or as a member which substantially covers an active surface of the semiconductor substrate and forms a protective structure over each semiconductor device carried by the active surface. Assemblies that include the support structure and a semiconductor substrate are also within the scope of the present invention, as are methods for forming the support structures and thinning and post-thinning processes that include use of the support structures.
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