MEMS devices requiring no mechanical support
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United States of America Patent
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May 11, 2010
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app pub date -
Dec 7, 2007
filing date -
Dec 7, 2007
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Abstract
MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.
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