Electromechanical system having a dielectric movable membrane and a mirror
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United States of America Patent
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May 11, 2010
Grant Date -
Nov 13, 2008
app pub date -
May 9, 2007
filing date -
May 9, 2007
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Abstract
A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable reflective element. The movable reflective element includes a flexible dielectric layer and a second reflective layer mechanically coupled to the flexible dielectric layer. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer.
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