Methods and apparatus for mapping carrier contents
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United States of America Patent
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May 18, 2010
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N/A
app pub date -
Sep 6, 2005
filing date -
Sep 4, 2004
priority date (Note) -
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Abstract
In a first aspect, a first method of mapping contents of a substrate carrier is provided. The first method includes the steps of (1) coupling a sensor to the substrate carrier or a loadport adapted to receive the substrate carrier; and (2) determining a presence or absence of a substrate in a slot of the substrate carrier using the sensor. Numerous other aspects are provided.
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