Heat treatment method and heat treatment apparatus
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United States of America Patent
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May 25, 2010
Grant Date -
Oct 5, 2006
app pub date -
Mar 29, 2006
filing date -
Mar 31, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
In a heat treatment method for supplying transforming gas and enriched gas inside a furnace and heat treating a workpiece inside the furnace, feedback control of carbon potential is performed by operating a supply flow rate of the enriched gas based on carbon potential inside the furnace, the feedback control is stopped before an opening of the furnace is opened and supply flow rates of the transforming gas and the enriched gas are increased from supply flow rates thereof immediately before the feedback control is stopped; and the supply flow rate of the transforming gas is returned to the supply flow rate thereof immediately before the feedback control is stopped and the feedback control is resumed after the opening of the furnace is closed.
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