Method and apparatus for fluid processing a workpiece
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United States of America Patent
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May 25, 2010
Grant Date -
Apr 28, 2005
app pub date -
Oct 22, 2004
filing date -
Oct 22, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
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