Photodetector arrangement, measurement arrangement with a photodetector arrangement and process for operating a measurement arrangement
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United States of America Patent
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May 25, 2010
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app pub date -
Mar 23, 2007
filing date -
Mar 23, 2006
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Abstract
A photodetector arrangement has a semiconductor body with a substrate, and first, second and third layers. The first layer is located at the first main surface of the semiconductor body which is suited for reception of incident photon radiation which is to be detected. The second layer is located at the second main surface of the semiconductor body which is at a distance to the first main surface. The third layer is located between the substrate and the second layer.
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