Top metal layer shield for ultra-small resonant structures
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United States of America Patent
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May 25, 2010
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app pub date -
May 5, 2006
filing date -
May 5, 2006
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Abstract
When using micro-resonant structures which are being excited and caused to resonate by use of a charged particle beam, whether as emitters or receivers, especially in a chip or circuit board environment, it is important to prevent the charged particle beam from coupling to or affecting other structures or layers in the chip or circuit board. Shielding can be provided along the path of the charged particle beam, on top of the substrate, to prevent such coupling.
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