MEMS switches with deforming membranes

United States of America Patent

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May 25, 2010
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Dec 19, 2006
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Dec 19, 2006

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Abstract

MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.

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SNAPTRACK INC	5775 MOREHOUSE DR SAN DIEGO CA 92121

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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Inventor Name	Address	# of filed Patents	Total Citations
Kogut, Lior	Sunnyvale, US	45	1538
Lewis, Alan	Sunnyvale, US	68	1225
Tung, Ming-Hau	San Francisco, US	78	2861

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MEMS switches with deforming membranes

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United States of America Patent

11641649

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 25, 2010	US,7724417,B2 US7724417B2	GRANTED PATENT AS SECOND PUBLICATION
June 19, 2008	US,20080142347,A1 US20080142347A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7724417
SERIAL NO	11641649
DOCKET NO

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11641649

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