MEMS switches with deforming membranes

United States of America Patent

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May 25, 2010
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Dec 19, 2006
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Dec 19, 2006

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Abstract

MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.

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SNAPTRACK, INC.

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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Inventor Name	Address	# of filed Patents	Total Citations
Kogut, Lior	Sunnyvale, US	45	1531
Lewis, Alan	Sunnyvale, US	65	1143
Tung, Ming-Hau	San Francisco, US	78	2829

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MEMS switches with deforming membranes

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United States of America Patent

11641649

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 25, 2010	US,7724417,B2 US7724417B2	GRANTED PATENT AS SECOND PUBLICATION
June 19, 2008	US,20080142347,A1 US20080142347A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7724417
SERIAL NO	11641649
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11641649

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