Air bridge structures and methods of making and using air bridge structures
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United States of America Patent
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-
Jun 1, 2010
Grant Date -
Feb 26, 2009
app pub date -
Oct 28, 2008
filing date -
May 9, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe card assembly, according to some embodiments of the invention, can comprise a tester interface configured to make electrical connections with a test controller, a plurality of electrically conductive probes disposed to contact terminals of an electronic device to be tested, and a plurality of electrically conductive data paths connecting the tester interface and the probes. At least one of the data paths can comprise an air bridge structure trace comprising an electrically conductive trace spaced away from an electrically conductive plate by a plurality of pylons.
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