Polishing tool and polishing method and apparatus using same

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United States of America Patent

PATENT NO 7736215
APP PUB NO 20080085662A1
SERIAL NO

11987382

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Abstract

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or more and a hardness of 30 or more, and abrasive grains dispersed in the felt. A polishing method and apparatus involving pressing the polishing means against a surface of a workpiece to be polished, while rotating the workpiece and also rotating the polishing tool.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Masashi Tokyo, JP 66 546
Koma, Yutaka Tokyo, JP 17 115
Sekiya, Sinnosuke Tokyo, JP 2 15
Yamamoto, Setsuo Tokyo, JP 26 122

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