Thin film microshells incorporating a getter layer
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United States of America Patent
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Jun 15, 2010
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N/A
app pub date -
Mar 9, 2007
filing date -
Mar 9, 2007
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Abstract
Low temperature, multi-layered microshells for encapsulation of devices such as MEMS and microelectronics. The microshells may include a perforated pre-sealing layer, below which a sacrificial layer is accessed, and a sealing layer to close the perforation in the pre-sealing layer after the sacrificial material is removed. The pre-sealing layer includes a large surface area getter layer to remove contaminants from the space ultimately enclosed by the microshell to improve the pressure control and cleanliness of the microshell.
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