Pixelated modulation of illumination pupil image
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United States of America Patent
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Jun 15, 2010
Grant Date -
Oct 2, 2008
app pub date -
Mar 30, 2007
filing date -
Mar 30, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention describes a method of conditioning radiation upstream from a reticle including: pixelating the radiation, the pixelating involving partitioning into pixels; modulating a first set of the pixels to configure for openings; modulating a second set of the pixels to outline for specific features of the openings; modulating a third set of the pixels to correct for local non-uniformities; modulating a fourth set of the pixels to compensate for global non-uniformities; and modulating a fifth set of the pixels to establish for gray scale.
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