Methods for planarizing a semiconductor contactor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 15, 2010
Grant Date -
Feb 28, 2008
app pub date -
Aug 28, 2007
filing date -
Mar 17, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
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