Radiation beam pulse trimming

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United States of America Patent

PATENT NO 7738079
SERIAL NO

11598837

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Abstract

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A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Noordman, Oscar Franciscus Jozephus Eindhoven, NL 14 59
Vink, Henri Johannes Petrus Delft, NL 13 79
Visser, Huibert Zevenhuizen, NL 31 615

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