Methods for detecting and classifying defects on a reticle
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United States of America Patent
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Jun 15, 2010
Grant Date -
Dec 11, 2008
app pub date -
May 6, 2008
filing date -
May 7, 2007
priority date (Note) -
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Abstract
Methods for detecting and classifying defects on a reticle are provided. One method includes acquiring images of the reticle at first and second conditions during inspection of the reticle. The first condition is different than the second condition. The method also includes detecting the defects on the reticle using one or more of the images acquired at the first condition. In addition, the method includes classifying an importance of the defects detected on the reticle using one or more of the images acquired at the second condition. The detecting and classifying steps are performed substantially simultaneously during the inspection.
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