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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC	P O BOX 5800 MS-0161 LEGAL TECHNOLOGY TRANSFER CENTER ALBUQUERQUE NM 87185

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H05H:PLASMA TECHNIQUE

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Clift, Wayne M	Tracy, US	1	0
Grunow, Philip A	San Leandro, US	1	0
Klebanoff, Leonard E	San Clemente, US	24	305

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 22, 2010	US,7740916,B2   US7740916B2	GRANTED PATENT AS SECOND PUBLICATION
May 20, 2010	US,20100124723,A1   US20100124723A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7740916

Method for the protection of extreme ultraviolet lithography optics

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