Microcantilever infrared sensor array
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United States of America Patent
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Jun 22, 2010
Grant Date -
Sep 25, 2008
app pub date -
Mar 20, 2007
filing date -
Mar 20, 2007
priority date (Note) -
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Abstract
A radiation sensor array that exhibits improved fill factor is disclosed. The radiation sensor array incorporates sensors having support arms that are nested in vertical fashion with the support arms of neighboring sensors. This vertically-nested structure enables the radiation-sensing portions of the sensors to be more closely-packed.
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