MEMS device having distance stops
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United States of America Patent
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Jun 22, 2010
Grant Date -
Jan 3, 2008
app pub date -
Jun 30, 2006
filing date -
Jun 30, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.
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