System and apparatus for repairing micromirrors in spatial light modulators
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United States of America Patent
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Jul 6, 2010
Grant Date -
Nov 8, 2007
app pub date -
Jul 6, 2007
filing date -
Feb 28, 2005
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Abstract
Disclosed herein are a system and apparatus for operating a device that comprises an array of micromirrors. The system and apparatus are usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation can be applied independently to the micromirrors. Alternatively, the reparation can be incorporated with a bias inversion process.
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