Devices for probe microscopy
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United States of America Patent
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Jul 13, 2010
Issued Date -
N/A
app pub date -
Aug 14, 2007
filing date -
Oct 28, 2005
priority date (Note) -
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Abstract
An atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.
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