Tunable microcantilever infrared sensor
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United States of America Patent
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Jul 13, 2010
Grant Date -
Sep 25, 2008
app pub date -
Mar 20, 2007
filing date -
Mar 20, 2007
priority date (Note) -
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Abstract
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
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