Dynamic pattern generator with cup-shaped structure
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United States of America Patent
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Jul 13, 2010
Grant Date -
May 7, 2009
app pub date -
Nov 7, 2007
filing date -
Nov 7, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
One embodiment relates to a dynamic pattern generator for reflection electron beam lithography which includes conductive pixel pads, an insulative border surrounding each conductive pixel pad so as to electrically isolate the conductive pixel pads from each other, and conductive elements coupled to the conductive pixel pads for controllably applying voltages to the conductive pixel pads. The conductive pixel pads are advantageously cup shaped with a bottom portion, a sidewall portion, and an open cavity. Another embodiment relates to a pattern generating apparatus which includes a well structure with sidewalls and a cavity configured above each conductive pixel pad. The sidewalls may include alternating layers of conductive and insulative materials. Other embodiments, aspects and feature are also disclosed.
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