Method for high precision printing of patterns
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United States of America Patent
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Jul 13, 2010
Grant Date -
Jul 19, 2007
app pub date -
Jun 14, 2004
filing date -
Jun 12, 2003
priority date (Note) -
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Abstract
The present invention includes a method to print patterns with improved edge acuity. The method for printing fine patterns comprises the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude.
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