Micro mirror device
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United States of America Patent
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Jul 13, 2010
Grant Date -
Jun 25, 2009
app pub date -
Feb 18, 2009
filing date -
Nov 1, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
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