Importance

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Abstract

The invention provides for a micro-electromechanical nozzle arrangement for an inkjet printhead. The arrangement includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry. The arrangement also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber. Also included is a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails. Each actuator has a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber to increase a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle. Each actuator is cantilevered to a heater element in a bendable manner.

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First Claim